Information Automation

XGemPro GEM Driver

Optimum Solution for GEM Implementation,

Recognized by Excellent Business Partners at Home and Abroad

XGemPro / XGem300Pro

· GEM communication driver

· Supports SEMI E4, E5, E30, E37, E40, E87, E90 and E94

· Features with XCOM, GEM, 300mm Scenario Intelligence


XGemPro GEM Driver is a GEM communication driver that allows you to make GEM communications more easily and conveniently. It supports SEMI E30 GEM specifications. As it makes complex GEM communications be executed with a simple definition of data related to the GEM scenarios on Configuration tools, it saves development costs and increases productivity.


XGem300Pro is an extension of XGem for the 300mm specifications.
It supports SEMI E30, E40, E87, E90 and E94 specifications.

XGemPro/XGem300Pro Features and Functions

1) XGemPro Features

· Proved SECS Communications (using XCom SECS Driver)
· ActiveX-Based OCX control
· Various development tools (Visual C++, Visual Basic, C#, Delphi, C++Builder)
· Automatic generation and processing of 200mm and 300mm GEM Messages
· Automatic creation of data used on 200mm and 300mm GEM scenarios
· User-defined SECS messages
· User-defined communication scenarios

2) Standards Supported by XGemPro

· SEMI E87 (Specification For Carrier Management)
· SEMI E94 (Specification For Control Job Management)
· SEMI E30 (Generic Model For Communications And Control Of Manufacturing Equipment)
· SEMI E4 (SEMI Equipment Communication Standard 1 Message Transfer)
· SEMI E5 (SEMI Equipment Communication Standard 2 Message Content)
· SEMI E37 (HIGH-SPEED SECS Message Services)
· SEMI E40 (Standard For Processing Management)
· SEMI E90 (Specification For Substrate Tracking)

3) XGemPro Features

· Support for state model (Communications State Model, Control State Model)

· Dynamic (Fixed) Event Reporting with just simple clicks
· Trace with automatic processing of real-time data

· Message control and transmission in Spooling State

4) XGem300Pro Functions

· Support for Process Job State Model
· Support for Carrier & Load Port State Model
· Support for Control Job State Model
· Support for Substrate State Model

5) Examples

Products Line-Up

· XGemPro : Supports SEMI E30(GEM)
· XGem300Pro : Supports SEMI E40 (PM), E87 (CMS), E90 (STS), E94 (CJW) as well as SEMI E30 (GEM)

System Requireements

· CPU : Pentium Dual Core or higher
· Memory : 2GB
· OS : Windows XP SP2 / Windows Server 2003 SP2 / Windows Server 2008 /
          Windows Vista SP1 / Windows 7 / Windows 8 / Windows 8.1 / Windows 10
· Protection Key : H/W Protection (Parallel port or USB port)

XGemPro GEM Driver offers tools to implement an SECS system and the relevant test supporting tools.

Configuration Tool

Simulator Tool

· Operates message Scenarios(Automatic and consecutive message generation & looping)
· Replies secondary messages automatically
· Sets values of the message items
· Can be applied to the message communication test